核反応解析法による非蒸発ゲッター材料への水素の吸収・放出特性の研究

松本 益明; 岡田 朋大; Markus Wilde; 福谷 克之; 間瀬 一彦; 金 秀光; 谷本 育律; 本田 融

doi:10.14886/jvss.2019.0_2P10

Annual Meeting of the Japan Society of Vacuum and Surface Science 2019

Session ID : 2P10

DOI https://doi.org/10.14886/jvss.2019.0_2P10

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Host: The Japan Society of Vacuum and Surface Science

Study of hydrogen incorporation and release properties of the nonevaporable getter materials by nuclear reaction analysis

*Masuaki Matsumoto, Tomohiro Okada, Wilde Markus, Katsuyuki Fukutani, Kazuhiko Mase, Xiuguang JIN, Yasunori Tanimoto, Tohru Honda

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Abstract

The Conventional type nonevaporable getter (NEG) made of TiZrV and a newly developed oxygen-free Pd/Ti NEG coating was studied by ¹H(¹⁵N, αγ) ¹²C Resonance Nurclear Reaction Analysis (NRA). The depth profiles of H and the variations of NRA yield at a depth in the thin NEG film were compared at different hydrogen pressures and annealing temperatures.

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