Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2020
Session ID : 3Cp04
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Growth of single walled carbon nanotubes by hot filament assisted CVD using Ru catalysts
*Takuya SakamotoYutaka Ishikawa
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Abstract

The growth of single-walled carbon nanotubes (SWCNTs) using ruthenium as a catalyst has been reported. However, there are no reports on the use of hot-filament chemical vapor deposition (HFCVD) method. The growth of SWCNTs was attempted by HFCVD using ruthenium as a catalyst. Ethanol was used as the carbon source. At a growth temperature of 700℃, web-like products were recognized from the SEM images. The Raman spectra showed peaks in the G-band and RBMs, indicating the presence of SWCNTs in the products.

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© 2020 The Japan Society of Vacuum and Surface Science
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