Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2020
Session ID : 1Ea10
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Host: The Japan Society of Vacuum and Surface Science

Fabrication of microstructured TiN films by glancing-angle reactive sputtering
Takahiro Mizoguchi, Yoshiyuki Nakayama, *Yasushi Inoeu, Osamu Takai
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Abstract

We have successfully fabricated TiN films with isolated-nanocolumnar structures via reactive sputtering with glancing-angle deposition scheme. The nanostructured TiN films have strong (100) orientation. Due to light scattering, the reflectance of the TiN films are suppressed in the visible range.

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© 2020 The Japan Society of Vacuum and Surface Science
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