Host: The Japan Society of Vacuum and Surface Science
A surface treatment apparatus using atomic hydrogen generated on heated tungsten was constructed at the end station of a material analysis beamline BL-07B in NewSUBARU synchrotron radiation facility. Since this apparatus is directly connected to a vacuum chamber through a gate valve, it is possible to evaluate samples treated by atomic hydrogen without air exposure. It is confirmed that the surface contamination is drastically reduced in X-ray photoelectron spectroscopy after the treatment using atomic hydrogen.
