Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2020
Session ID : 1P49
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Host: The Japan Society of Vacuum and Surface Science

Influence of adsorbed gases on activation process and pumping performance for NEG coating
*Xiuguang Jin, Yasunori Tanimoto, Takashi Uchiyama, Tohru Honda
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Abstract

In the activation process, non-evaporable getter (NEG) alloys dissolute the adsorbed gases into bulk, so the pumping performance decreases after the repetition of the activation. In order to elongate the NEG (TiZrV alloy) coated ducts life time, the influence of the adsorbed gases on the activation process and pumping performance were investigated.

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© 2020 The Japan Society of Vacuum and Surface Science
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