Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2021
Session ID : 1Ap01
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November 3, 2021
Issues in reliability of measurement data
*Mineharu Suzuki
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

In recent years, material development has been promoted in a short period of time, and multifaceted reliability has been regarded as a problem. In the field of surface analysis as well, reliability in the entire flow of measuring equipment, specimen preparation, measurement, and data processing becomes an issue. The elements of reliability in measurement are organized as 3Rs (repeatability, reproducibility, reproducibility). Based on this, the Surface Analysis Research Division introduced the progress of measurement and data processing using the latest equipment, and planned an opportunity to discuss standardization in surface chemical analysis.

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© 2021 The Japan Society of Vacuum and Surface Science
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