Host: The Japan Society of Vacuum and Surface Science
Hard X-ray Photoelectron Spectroscopy (HAXPES), which uses higher-energy X-rays than conventional photoelectron spectroscopy (X-ray Photoelectron Spectroscopy: XPS) using Al Kα (1486.6 eV) and Mg Kα (1253.6 eV), is drawing attention as one of the methods for evaluating the buried interface, which is a usually important factor that determines the device performance. Especially in recent years, laboratory-based HAXPES (Lab. HAXPES) has been developed and is being widely used in addition to synchrotron radiation facilities. Liquid Ga Kα (9251.74 eV) is used as the excitation light source to ensure stable and high intensity. In this presentation, we will introduce some measurement examples and discuss about the future prospects in various fields appropriate for Lab. HAXPES.
