Host: The Japan Society of Vacuum and Surface Science
Standardization in the field of surface chemical analysis is discussed in International Organization for Standardization/Technical Committee 201 (ISO/TC 201). In this talk, trends of standardization of surface chemical analysis in ISO/TC 201, especially, activities in sub-committee 4 (SC4) (depth profiling) and SC7 (electron spectroscopy), in which the author is mostly involved, are introduced.