Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2021
Session ID : 1Ap11
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November 3, 2021
Spectrum adapted EM algorithm for high-throughput peak fitting analysis of spectral data
*Tarojiro Matsumura
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Abstract

We introduce the spectrum adapted EM algorithm as a method for high-throughput analysis of spectral data. In this presentation, we explain the theoretical background of the spectrum adapted EM algorithm and introduce examples of its application to a synthetic spectral data and an experimental spectral data collected by XPS. Moreover, we introduce an advanced method of the spectrum adapted EM algorithm based on the ECM algorithm. Using this advanced method, we demonstrate recent works for the background subtraction and optimization of the number of decomposed peaks in the peak fitting of spectral data.

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© 2021 The Japan Society of Vacuum and Surface Science
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