Molecular dynamics analysis of shearing behavior in nano-scale thin-film

Abstract

While the nanoimprint technology is widely used as a microfabrication technique, it has become difficult to predict empirically the nanotribological phenomena in the interface between mold and organic materials during the processes such as alignment, filling and releasing at sub-10 nm scale. In this study, in order to obtain fundamental knowledge on nano-tribological phenomena, we discussed the effect of shear conditions, such as the type of organic material,roughness of the substrate, and press pressure, on the shear stress at the atomic level.