Host: The Japan Society of Vacuum and Surface Science
In this study, we investigated the antibacterial property of the Shirasu thin film produced by the sputtering method. From the research results to date, it was confirmed that the Shirasu thin film also has antibacterial properties. However, antibacterial mechanisms remain unclear in spite of the antibacterial test method has been improved and the relevant between the component chemical composition distribution and antibacterial reproducibility has been tested. Therefore, it was tried that a dry etching process was used to develop Lewis acid sites on the Shirasu thin film, which are thought to exhibit antibacterial properties due to their catalytic activity. As a result, it was found the relationship between etching time and amount of expression of acid point.
