抄録
Recently developed Spectrum Imaging for Auger electron spectroscopy (AES) would be a next-generation analysis method providing cube data image with a wide spectrum at all pixels [1]. By the post data processing, the cube data can provide any total spectrum within any regions as you selected, and it can also reconstruct another meaning map by focusing on a slight difference of direct/differential spectra, for example, energy-filtered secondary electron images, elemental maps, chemical state maps and REELS maps.
In this presentation, we will explain the overview of Spectrum Imaging and its possibilities, and introduce some applications. As a further step, we acquired high energy resolution spectra at a pass energy of 10 eV with a semiconductor sample and evaluated the accuracy of this method. As a result, a distribution of p-type/n-type areas was obtained at a pn junction area by the Si KLL peak shift of 0.6 eV due to the fermi level difference clearly.
References
[1] Noboru Taguchi, Tatsuya Uchida, Konomi Ikita, AkihiroTanaka, Nobuyuki Ikeo, Kazushiro Yokouchi and Kenichi Tsutsumi, Ultra microscopy, 233,113450 (2022).
