High Resolution Replica and its Application

Abstract

To obtain higher resolution rplica than previous one improvements of metallic evaporated film were carried out in the case of using two-stage replica. It was found that, among various metallic elements used, many elements such as Zr, Si, Fe and etc. were very superior to Al as evaporated film of high resolution replica. Further high resolution replica was also obtained by using evaporated film after previous proper ion-or electron-bo mbardment of transfered plastic film. Comparison between continuous evaporation and intermittent one for producing of high resolution replica was made. According to results obtained a few examples of its application are shown.