TiN薄膜の摩擦摩耗特性に及ぼす成膜後基板焼入れ処理の影響
2006 年 72 巻 716 号 p. 568-573
詳細
2006 年 72 巻 716 号 p. 568-573
In order to investigate the effects of the substrate post quenching on the tribological properties of TiN film, a specimen which steel substrate (carbon tool steel, JIS SK3) was quenched after TiN coating was prepared, and the ball-on-disc type wear test was carried out using ZrO2 ball. The delamination initiation life of TiN film was improved by the high adhesive strength of TiN film obtained by the substrate post quenching. The specific wear rate was also improved by the substrate post quenching, though the TiN hardness was lower than that of the conventional type specimen which was TiN coated after substrate quenching. The reason why the specific wear rate was improved could be explained as follows. In the substrate post quenching process, TiN was partly oxidized and titanium oxide which acted as a lubricant was formed on TiN surface. Attributed to the formation of titanium oxide, the friction coefficient lowered and the lower specific wear rate could be obtained.
