Residual stresses and the resulting dimensional changes due to thermal spraying can be a major factor in affecting the performance of fabricated parts and components. In this study, the residual stress and deformation behaviors of square plate due to blasting treatment and thermal spraying was clarified by based on an inherent strain method... It was found that the inherent strain of blasted surface, that was calculated by the deflection measurement of substrate (JIS SS400, 150×150×1 tmm), was +0.026% in x-direction of square substrate and +0.082% in y-direction of square substrate. Also, it was found that the inherent strain of titanium plasma sprayed layer on the blasted substrate that was calculated by the deflection measurement of the blasted plate was -0.061% in x-direction of substrate and -0.16% in y-direction of substrate. It was also confirmed that the inherent strain method due to deflection measurement was applicable to estimate the residual stress distribution in case of the titanium plasma sprayed steel plate with blasting treatment. As a result, it was found that the residual stress at the surface of plasma sprayed steel plate was 7.60 MPa in x-direction of substrate and 20.4 MPa in y-direction of substrate.