In the present paper, some experiments for press molding and numerical simulation about micro press molding of glass devices using finite element method is investigated. Thermo-viscoelastic properties of the glass materials were estimated using unidirectional compression creep test based on traditional thermo viscoelastic theory. In this study, Pyrex and D263 were used as glass materials. Glass micro press molding was carried out with Glass-like Carbon (GC) mold given to Line & Space patterns machined by dicing. The adaptive condition of the molding temperature which given appropriate transcription profile of the glass was investigated. Moreover, numerical simulation for micro press molding of the glass was carried out by finite element method using universal FEM code (ANSYS ver. 11.0). As a result of comparing experimental results with numerical ones, the cross section shape and the height of groove profile obtained by FEM simulation approximately agree with experimental value.
