微小差圧の測定

抄録

A pressure gauge of the diaphragm type of high sensitivity has been developed to measure small differential pressures. Low and high pressures are each led to chambers which are separated with a membrane; the differential pressure between the two chambers give a displacement to the membrane, and the displacement is detected by a small laser displacement sensor through a glass window in the chamber wall. Tested membranes are permanently deformed in advance to a wavy form in order to give high sensitivity or are otherwise used in the flat condition. Easy exchange of the kinds of membranes makes it possible to widen the range of differential pressures measured. Calibration is made by means of a simple method using water heads. This type of pressure gauge can measure the pressure of magnitude from 0.1 Pa to 10 Pa.