A quantitative analysis of critical heat flux (CHF) under high mass flux with high subcooling at atmospheric pressure was successfully carried out by applying a new transition region model for a macro-water-sublayer on heated walls to the existing model of a vapor blanket over the macro-water-sublayer. The CHF correlation proposed in this study could predict well the existing experimental data obtained for water mass flux of 940 to 20 300kg/m2s using circular tubes of 2 to 4mm in diameter and 30 to 100mm in length with inlet subcooling of 30 to 90°C and rectangular channels heated from one side with gap of 3 to 20mm, length of 50 to 305mm and inlet subcooling of 30 to 77°C and revealed a unique feature of CHF that the effects of wall friction of subcooled boiling flow and the velocity of the steam blanket above the macro-water-sublayer at atmospheric pressure become the dominant factors while those were not dominant at higher pressures.