抄録
The laser opto micro actuator induced by a laser beam is proposed. In the Intermediate region of molecular gas dynamics, the actuator is a small fluid machinery rotated by the molecular gas dynamics effect with the energy conversion from laser beam energy to thermal energy. In this paper the effects of supporting systems, rotor materials, laser powers on the rotational phenomena are discussed by experimental approach. The supporting systems of an actuator axis were changed to a permanent magnet for a radial bearing. Aluminum and glass were selected for the rotor materials. By the permanent magnet bearing and glass rotor the rotational rates of the actuator rotor are faster than the rate of the alumimum rotor by 2.5 times.
