抄録
In this paper, we fabricated a Bi2Te3 thermoelectric micro-generator, and evaluated those performances. Bi2Te3 is one of popular thermoelectric materials with the highest thermoelectric properties at room temperature. The patterned thin film of Bi2Te3 was deposited on a free-standing Si3N4 thin film by using a flash evaporation method through shadow masks which were made by standard micro-fabrication processes. In the design of the micro-generators, we got the output voltages of the micro-generators by numerically calculating the temperature distribution of the freestanding thin film using ANSYS CFX. The calculated output voltages agreed well with experimental results. The output voltages of the fabricated micro-generators were measured while simply heating the bottom of the micro-device, and the maximum output voltage was 48 mV at a 13 K temperature difference.
