抄録
This paper describes especially the effect of the static stiffness of a surface grinding machine on the grinding accuracy of fine ceramics (Aluminum Oxide, Silicon Carbide and Silicon Nitride) which are ground by a conventional surface grinding operation. Fine ceramics are ground by two types of surface grinding machines which have different static stiffnesses. As a result, the amount of the residual depth of the cut of fine ceramics is showen to be proportional to the value of the static stiffness of the grinding machine, The static stiffness of a surface grinding machine can be estimated by the residual depth of cut of the fine ceramics being ground.
