1989 年 55 巻 510 号 p. 498-502
A 15 MHz surface Rayleigh wave system with computer controlled data acquisition and analysis was used to study the detection and characterization of surface flaws in ceramics. Rayleigh waves were generated by placing a focused transducer at critical angles with respect to the test specimens included with artificial flaws and indentation flaws. The scattering of the waves into water by the surface flaws was detected, analysed in the time domain and correlated with the size and the shape of the flaws. The surface Rayleigh wave technique by the device could detect flaws as small as 40 μm deep on soda-lime glass and 50 μm on silicone nitride.