圧電素子をアクチュエータとするフレキシプルアームの変位制御 : 理論解析法並びに素子の駆動法

抄録

This paper describes the tip displacement of a flexible miniature arm controlled by the piezoelectric bimorph cells cemented on the surface of the arm. The arm is driven by the torques generated by the cells, and the endpoint of the arm is controlled so that it moves in synchrony with the fluctuation of the target and maintains a constant distance to the surface of the target. The voltage applied to the cells is controlled by a feedback signal composed of the tip displacement and the velocity. A theoretical solution is obtained by considering the cell-arm system as a stepped beam and applying the time-discrete method to the governing equations of the system. Experimental results are obtained and compared with the theoretical ones. Both results are good agreement for a wide range of physical parameters involved.