窒化けい素セラミックスの無欠陥レーザ加工
1990 年 56 巻 522 号 p. 498-503
詳細
1990 年 56 巻 522 号 p. 498-503
In the laser machining of ceramics, it is difficult to avoid the formation of a recast layers and cracks. These deffects significantly spoil some excellent properties of ceramics. This paper describes the feasibility of a crack-free processing method. for hot-pressed silicon nitride (Si3N4) ceramics with an yttrium aluminum garnet (YAG) laser. It is found that, in order to attain the defect-free machining, it is necessary to process the ceramics using a laser beam pulsed below 500 ns in duration and 10 kHz in repetition rate.
