超音波顕微鏡によるガラス基板上の金薄膜の特性評価

抄録

Ultrasonic characteristics of layered materials depend on their material properties and film thickness. Ultrasonic microscopes have been used for measurement of these material properties and the thickness of films. However, ultrasound reflects or refracts at the boundary of materials with different acoustic impedance. These ultrasonic signals interfere complicatedly, and this causes misunderstanding in analysis of the obtained data. For easy understanding of the data, it is useful to analyze basic models of layered materials. In this paper, we describe the ultrasonic characterization of gold film on glass. Change in the reflection coefficient and particle velocity with the incident angle of ultrasound are shown for several film thicknesses. Ultrasonic propagation behaviors on the delaminated film are also discussed. It is found that the propagation mode of ultrasound on the delaminated film differs from that of well-deposited film on glass.