紫外光干渉による磁気ヘッドスライダ浮上量の精密測定法
1994 年 60 巻 571 号 p. 949-955
詳細
1994 年 60 巻 571 号 p. 949-955
A new flying height tester has been developed for magnetic head sliders. This tester measures the light interference fringe patterns between the slider and a glass disk, and calculates the absolute flying height from their peak positions. The tester uses monochromatic incoherent UV and visible light, which has a minimum wavelength of about 200 nm, and the slider's dynamic motion measurement system is separated from the static flying height measurement system. Hence, it can measure a 50 nm flying height within an error of less than 1 nm. The tester can also measure a slider's dynamic motion in the 0-100 kHz frequency range using photodiode arrays. The performance of the tester was confirmed through careful experiments.
