静圧気体潤滑直進案内面の運動精度特性に関する研究 : 第1報,軸受パッドの基礎運動精度特性

抄録

Sliding accuracy characteristics such as the variation of floating height and the pitching-mode angular fluctuation of an externally pressurized gas-lubricated pad bearing travelling on a linear guide way are investigated theoretically with special attention paid to the relationship between the sliding accuracy and the machining error of the guide-way rail, where sinusoidal undulation of the guide-way surface is assumed. The effects of pitch length of the undulation of the rail surface on the sliding accuracy characteristics are discussed. The experimental results verify the validity of the theoretical analysis of the sliding accuracy of the bearing pad.