マイクロ領域の物理現象に基づくマイクロマニピュレーション : 吸着形エンドエフェクタの原理と試作実験

抄録

Micro manipulation is required for assembly and maintenance of micro machines and their parts. If the objects to be handled are miniaturized, interactive forces between micro particles and grip surface become dominant. We proposed a handling strategy of micro objects based on physical phenomena in the micro world. In this paper, we propose the adhesion-type micro endeffector. This endeffector is designed to pick up a micro object by adsorption force. In order to pick up the micro object, the endeffector temperature is increased to exceed room temperature before touching the object. After contact with the object, its temperature is decreased and positive pressure is generated inside the micro hole. To release this pressure, the endeffector temperature is increased again. This system realizes quick response due to its scale advantage as long at it is miniaturized in micro order. We made a prototype endeffector by Si surface micromachining. We analyzed the performance of this endeffector and conducted experiments. Finally, the effectiveness of the proposed method is shown.