散乱光を用いた直交二方向の光学的表面粗さ測定法

抄録

The surfaces of six ground specimens with an arithmetic mean roughness Ra ranging from 0.05 to 1.6μm were illuminated with a halogen lamp. The intensity distribution of the scattered light measured with a CCD camera was approximated by a two-dimensional (2-D) Gaussian function and its broadness was evaluated using the standard deviations (s.d.) σ_x and σ_y of the function. The S.d. σ_x perpendicular to the grinding direction increased with increasing Ra. On the other hand, the s.d. σ_y parallel to the grinding direction remained almost unchanged regardless of Ra. The distribution of the surface angle θ was calculated from the surface roughness profile. The s.d. σ_x increased with increasing s.d. σ_θ_x of the 2-D Gaussian function approximating the distribution of θ as σ_x=2.02+1.60 lnσ_θ_x This indicates that the intensity distribution of the scattered light represents the distribution of the surface angle θ.