抄録
A newly developed linear electrostatic microactuator is described. It produces vibration and is fabricated by a bulk silicon micromachining process. The moving part (slider) is sandwiched between two glass plates whose surfaces have many electrodes (fixed electrodes) . The slider is attached to these fixed electrodes by turns and actuates linearly on a macroscopic level. This mechanism is advantageous with regard to frictional influence and can achieve a large stroke. However, several difficulties have been identified regarding an attachment/detachment mechanism. The accumulation of charge caused by contact between the stators and slider is one of the most difficult problems. Our actuator incorporates micro pyramid stoppers, which prevent the accumula-tion of charge, on both surfaces of the moving part. The prototype has a casing size of 8 x 8 x 1.2 mm and achieves a 2 mm range of movement. The minimum driving voltage is 80 V and the maximum velocity is 2.0 mm/s. The behavior of the slider is not simple and further analysis is essential in order to improve positional accuracy, increase output force, and decrease driving voltage.
