シリコンの水による境界潤滑条件下の摩耗損傷と接触応力の関係

抄録

The tribological properties of silicon with and without water boundary lubrication with silicon, silicon carbide and a diamond tip were studied and the following results were obtained. (1) The friction coefficient between silicon and silicon or silicon carbide tips is as high as μ=0.2∼1.0, with and without lubrication. Surface damage occurred due to the adhesion between similar materials. (2) When a diamond is used as the opposite tip, the friction coefficient is as low as μ=0.09∼0.16 without lubrication. With water boundary lubrication, the friction coefficient is as low as μ=0.07. Damage is not observed on surfaces either with or without water boundary lubrication. (3) To determine the reason why sliding with the diamond tip did not result in damage, stress analysis was carried out using the boundary element method for each combination of materials. The maximum Mises stress was observed inside the silicon and diamond bulk when silicon and diamond were tested. However, the maximum Mises stress for the silicon with silicon and silicon carbide with silicon combination was observed.