平面上の複数円周測定による平面度計測法 : 多点測定法による一円周上の変位測定から複数円の平面度計算

抄録

In the previous paper we discussed a method for measuring displacement on one circumference. Five sensors are attached to the measuring apparatus. One is rotated and the others detect the rotary errors. In order to measure more precisely, we discuss a method which is separated rotary errors from measured values by coordinated measuring machine on basement plate. This paper describes the method for measuring flatness without using transfer function. This paper shows the experimental results and computer simulation to investigate the theoretical results. In order to get large flatness, we show a method that flatness is calculated from the displacements on several circumferences by least squares.