ゴムの動的変形特性を利用したダイヤモンドラッピングフィルムによるセラミックス研磨の高能率化

抄録

For obtaining higher finishing efficiency of diamod lapping films, the dynamic properties of rubber used for contact rolls pressing the diamond lapping films against ceramic workpieces were estimated. By examining the frequency response of rubber, the visco elastic characteristics were clearly recognised in detail. And, the contact conditions between the diamond lapping films and workpieces were examined by measuring the normal contact force throughout the different infeed processes. From the experiment, the effects of infeed speed and the set depth of pressing of lapping films on the normal contact force were clearly understood. For the purpose of obtaining a higher stock removal rate in the finishing process utilizing the dynamic properties of rubber contact roll, the infeed repetition finishing method was proposed and examined. By utilizing this control method, and by changing the amount of infeed and the infeed speed, the effects of this infeed method were confirmed.