2001 年 67 巻 653 号 p. 246-253
This paper established numerical scheme of the direct simulation Monte Carlo (DSMC) technique applicable to molecular gas film lubrication problems, in which mass flow rates must be detemined so as to be consistent with prescribed boundary pressures and temperatures. By calculating the lubrication characteristics of the inverse step type air bearings with nanometer spacings, the validity of the scheme was rigorously examined and the calculation results were compared with those by molecular gas film lubrication (MGL) equation, which is based on a linearized BGK model of the Boltzmann equation. Pressure distributions, velocity profiles and other physical quantities were found to agree well with each other, expect at the step position where assumptions in conventional lubrication theories including the MGL theory are not satisfied.