マイクロマシニングによる超小型電磁モータの開発 : 第3報,可撓性積層コイルの試作(機械要素,潤滑,工作,生産管理など)

抄録

The fabrication process of coils used for ultra small electromagnetic motor was investigated, and flexible multi-layered coils were formed using the micromachining technique in order to make the cylindrical stator. Three kinds of process, that is, the flexible sheet forming process with wiring pattern of coils, the multi-layered spiral coils process with SiO₂ insulation layer deposited by the residual stress control method and the removal process of a silicon substrate, were proposed. According to these process, 5-layered coils with ten turns in each layer were fabricated on the flexible sheet with the wiring pattern. From the observation results of fabricated coils, it was clarified that coils of 18 μm in thickness and of 8 μm in width in one layer were formed and stacked. The substrate bow or 12 μm was also corrected less than ±2 μm by the residual stress control.