超音波キャビテーションを利用した微細加工技術の開発研究(機械要素,潤滑,工作,生産管理など)

抄録

This paper proposes a new micromachining process featuring ultrasonic cavitation in distilled water as part of the processing principle. The cavitation, varied with the tool geometry and the clearance between the target workpiece surface and the tool connected to the horn, causes erosive action on the workpiece surface, achieving the desired micromachining. An experimental setup was developed to investigate the principle. The machining experiments demonstrated that the propagation of pressure waves generated by the ultrasonic cavitation varies with the tool geometry and clearance. This changes the erosive action, i. e., the machining characteristics, against the workpiece. At small clearances, the machined geometry closely followed the tool's geometry while, at clearances larger than a certain value, the cavitation generated a dent in the area corresponding to the tool center. This study found that the feasibility of applying the process to the form-copying process, such as die-sinking, requires the former conditions.