超精密工作機械用スピンドル組込み型流体駆動モータに関する研究

抄録

A motor driven by pressurized fluid flow, such as flow of water, hydraulic oil, or air, is presented. The motor structure is simple, which enables easy motor fabrication. The motor can be designed such that it can be applied to the spindle rotation of an ultra-precision machine tool. An advantage of the motor is that the pressurized fluid flow in flow channels, which are made in the spindle body, can generate torque for rotating spindle. This paper introduces theoretical equations of the motor. It is shown that the theoretical results are agreed with experimental results. As a result, based on the theoretical equations, software for designing a motor, which can introduce optimum parameters for obtaining highest efficiency, is developed. Performances of the motor are investigated through theoretical and experimental studies.