スラスト動圧シールによる微小流量制御方法の研究

連続塗布ディスペンサへの適用検討

抄録

Recently, in response to needs for smaller size and higher recording density of electronic components, there has arisen a demand for a technology that draws liquid material directly on substrate in high accuracy. In many cases, minute fine particles are included in the high viscosity fluid material. And the diameters of particles are from several micro meters to tens of micro meter. However, there was no method of controlling high viscosity and a powdered fluid without mechanical contact. In this report, we propose “Non-contact flow control valve” that satisfied following (1) (2). (1) The discharge passage is completely opened or completely shut off by changing the gap, and the gap of valve can keep 10 micro meter or more at any time. (2) It is possible to shift quickly by the order for milli-seconds among the ON/OFF state of fluid discharge without big flow change. (1) was achieved by “Spiral grooved thrust dynamic seal method” to control axially with two degrees of freedom actuator which is composed of a giant-magnetostrictive alloy and a DC servo motor. (2) was achieved by “Double piston method” that used the squeeze pressure effect. In this report, the experiments of drawing line using the developed dispenser equipped with above mentioned (1) (2) were done. As a result, starting and ending edges of the line were able to be formed with very high quality without lack of line, clod of fluid, dripping and thread-forming.