構造制御形固定砥粒研磨パッドの開発

加工特性の向上に関する検討

抄録

Recently, there has been strong demand for replacing the loose-abrasive machining with fixed-abrasive polishing because of the large amount of the waste slurry. However, the conventional fixed-abrasive polishing has the problem such as low finishing efficiency. To overcome the problem, in the previous report, a structure-controlled fixed-abrasive pad which consists of a fixed-abrasive layer and an abrasive holding layer was introduced for finishing optical glass. And then the finishing efficiency of the developed pad was higher than that of the conventional pad, but on the other hand, the factors which effects on the finishing efficiency were not clear. So, this paper deals with the effects of the pad surface condition which was considered as one of the influential factors on the processing properties. As a result, the factors which effects on the finishing efficiency was clarified. In addition, high finishing efficiency was able to be achieved by optimizing the pad surface condition.