空圧式除振装置に使用するノズルフラッパ形サーボバルブの振動抑制(機械力学,計測,自動制御)

抄録

In the field of precision positioning, an air type anti-vibration apparatus has been widely used. To realize the low vibration circumstance, some fundamental developments that decrease the natural frequency of isolated table are still executed. In addition to such development, many time-consuming jobs are necessary to eliminate the high frequency dynamics of isolated table. For example, the local mechanical vibrations are symptomatically attenuated using viscous damping materials. When the high frequency vibration due to the contact of electrical wirings is excited, it is necessary to rewire the electrical wires. Though these troublesome jobs are indispensable, it is not recognized that the nozzle flapper type servo valves used in the anti-vibration apparatus are the mechanical vibration source. To suppress the vibration levels, in this paper firstly, it is clearly shown that these servo valves are the vibration source. Next, it becomes clear that the vibration level of servo valve body icreases by adjusting the pressure feedback gain. Finally, the mechanical methods using the viscoelastic material are applied to reduce the vibration level and remarkable results are experimentally shown.