電極パターニングを用いたスマートフィルムセンサ(機械力学,計測,自動制御)

抄録

This paper presents a novel smart film sensor developed in the work using an electrode patterning technology. Conventional smart sensors based upon a PVDF film are first shaped in accordance with a desired shaping function, and then attached onto a substrate, thereby causing less-accuracy and less-traceability of a dynamical behavior especially at high frequencies. To overcome such problems, this paper introduces a photo-resist technique on electrode patterning of a PVDF film, with the result that the PVDF film becomes a distributed parameter smart sensor per se, hence shaping and attachment handling are no longer needed. Firstly, this paper overviews a two-dimensional modal filtering sensor for extracting several structural modes. Then, a systematic design procedure of a high-definition electrode patterning on a PVDF film is proposed. Furthermore, a PVDF film-based cantilever beam entailing the capability of modal filtering is developed, the validity of the proposed smart film sensor being analytically as well as experimentally verified.