絶対変位センサを用いた2自由度空圧式除振装置の制御 : ボイスコイルモータを用いた制振(機械力学,計測,自動制御)

抄録

In the field of vibration control, acceleration sensors are widely used as vibration sensors for large-space structures and soft ground. It is preferable to use velocity and displacement additionally. Then, the absolute velocity and displacement sensors are proposed and these can be used as feedback sensors. Up to now, the research, which is about each detected signal's feedback to an air type anti-vibration apparatus with one degree-of-freedom using an absolute displacement sensor, has been carried out. However, the apparatus will be connected each other in order to configure a large isolated table, and vibration modes of the table are selected and distributed in industrial applications. Since the above research is just one example of the applications, some practical applications should be presented more. Therefore, an anti-vibration apparatus with two degrees-of-freedom is controlled with absolute displacement sensors, and its application is verified in this paper.