KOBUNSHI RONBUNSHU
Online ISSN : 1881-5685
Print ISSN : 0386-2186
ISSN-L : 0386-2186
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“AFM Tomography” of Block Copolymer Thin Films
Kenji FUKUNAGA
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JOURNAL FREE ACCESS

2008 Volume 65 Issue 3 Pages 269-272

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Abstract
Microphase-separated structures in block copolymer thin films were was explored by means of atomic force microscopy (AFM) combined with stepwise surface etching. 3D-images were reconstructed from local etching rates determined by series of AFM data. The results showed a transformation of the microdomains that was accompanied with an adjustment of the local film thickness.
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© 2008 The Society of Polymer Science, Japan
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