レーザー研究
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
レーザー解説
パルスレーザー結晶化法のディスプレイデバイスへの応用
井上 満夫
著者情報
ジャーナル フリー

2003 年 31 巻 1 号 p. 33-39

詳細
抄録
Laser re-crystallization is being actively investigated to fabricate low temperature, polycrystalline silicon, thin-film transistors (TFTs) onto glass substrate for use in active-matrix liquid crystal displays (LCDs). Some attractive applications of TFTs are peripheral circuits and various sensors on the same glass substrate, which make highly functional active matrix displays. In this paper, an analog driver with operational amplifiers capable of canceling the offset voltage and a low-power consumption TFT-LCD with dynamic memory cells embedded in each pixel, are reviewed. Also an optical sensor array for digitizers and a capacitive fingerprint sensor are demonstrated. To realize a “system on panel” and “smart pixels”, it is necessary to fabricate the TFTs with higher mobility and higher uniformity in their characteristics.
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© 2003 一般社団法人 レーザー学会
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