Abstract
In this article, the basic principle of photoacoustic microscope (PAM) and imaging was introduced paying the special attention to its detection schemes. The experimental apparatus and applications of PAM were reviewed. Depth profiling using PAM in the nondestructive inspection of semiconductor device was discussed. The principle of spectroscopic analysis method by integration over PAM image measured with respect chemical reagent concentraion or pollen number was also discussed. Furthermore, photoacoustic imaging technique including photoacoustic tomography applied to biological imaging was reviewed.
