レーザー解説
原子ビーム制御と原子リソグラフィー
2004 年 32 巻 7 号 p. 443-449
詳細
2004 年 32 巻 7 号 p. 443-449
Recent progress in manipulating atoms with laser beams has made it possible to fabricate nanostructures using atom optics. This technique is called atom lithography and is expected to overcome the present technical limitations of conventional lithographic methods. This paper reviews the principles behind and some experimental results on atomic beam manipulation and its application for engineering high-performance atom lithography.
