抄録
Integrated optical microsensors based on photolithography were developed in the early 1990s. Since then, sensors that make the most of the intrinsic properties of laser diodes have been developed. A marriage of micromachining and opto-electronics is expected to create tremendous new opportunities for applications. This article introduces various laser-based microsensors that can be incorporated into a small actuator fabricated by micromachining technologies, and laser-based sensors using microstructural elements (microbeans, microspheres, and microtips).
