抄録
Recent progress of microelecromechanical system (MEMS) technology enable us to fabricate precise structures and integrate various components. Using this technology, near-field optical sources are fabricated for imaging, spectroscopy and future high-density data storage. An apertured microprobe with a cantilever is integrated at the end of optical fiber. A bow-tie near-filed optical probe with an integrated electrostatic actuator for enhancing the intensity of near-field due to the plasmon resonance effect is studied for imaging. Nearfield high-density data storage device is proposed, and sub-wavelength periodic structure is fabricated for increasing the efficiency to create localized optical field. To miniaturize this data-storage device, miniature XYZ stage is fabricated and demonstrated.
