抄録
A new design of vertical-comb (VC) actuators has been developed to suppress in-plane electrostatic pull-in motion. VC with off-centered electrostatic combs has been found to expand the stable range in the tilt-voltag ecurves; the effectiveness has been examined by numerical simulation using ARCHITECT ®. We also have designed a fiber optic variable attenuator and experimentally confirmed the use of off-centered vertical combdrive actuator.
