抄録
Laser mask repair system is a machine to repair defects of photomasks by laser zapping and laser CVD (Chemical Vapor Deposition). Laser zapping and laser CVD are briefly explained. Our laser mask repair systems LM700A, LM710A and LM500A/B are explained. LM700A/LM710A has been developed to repair defects of reticles used for 130/100 nm node semiconductor devices and LM500A/B has been designed for large scale photomasks used for the LCD manufacturing.
